MEMS sensors for sport engineer applications
نویسندگان
چکیده
منابع مشابه
Mems Flow Sensors for Nano-fluidic Applications
This paper presents micromachined thermal sensors for measuring liquid flow rates in the nanoliter-per-minute range. The sensors use a boron-doped polysilicon thinfilm heater that is embedded in the silicon nitride wall of a microchannel. The boron doping is chosen to increase the heater’s temperature coefficient of resistance within tolerable noise limits, and the microchannel is suspended fro...
متن کاملMems Physical Sensors for Automotive Applications
The automotive market has been a key driving market segment for the development of micro-electromechanical systems (MEMS). This paper provides an historical perspective on MEMS in automotive applications, examples of devices in production, requirements for the applications, infrastructure and specific engineering disciplines that have been developed to address these requirements, and a glimpse ...
متن کاملMEMS Sensors for Harsh Environment Applications
Micro and nano electro mechanical systems (MEMS and NEMS) have emerged as a technology that integrates micro/nano mechanical structures with microelectronics, mainly for sensing and actuation applications. MEMS and NEMS sensor systems that can operate in the presence of high temperatures, corrosive media and/or high radiation will reduce weight, improve machine reliability and reduce cost in st...
متن کاملMEMS ̄ow sensors for nano- ̄uidic applications
This paper presents micromachined thermal sensors for measuring liquid ̄ow rates in the nanoliter-per-minute range. The sensors use a boron-doped polysilicon thin-®lm heater that is embedded in the silicon nitride wall of a microchannel. The boron doping is chosen to increase the heater's temperature coef®cient of resistance within tolerable noise limits, and the microchannel is suspended from ...
متن کاملNASA NDE Applications for Mobile MEMS Devices and Sensors
NASA would like new devices and sensors for performing nondestructive evaluation (NDE) of aerospace vehicles. These devices must be small in size/volume, mass, and power consumption. The devices must be autonomous and mobile so they can access the internal structures of aircraft and spacecraft and adequately monitor the structural health of these craft. The platforms must be mobile in order to ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IOP Conference Series: Materials Science and Engineering
سال: 2021
ISSN: 1757-8981,1757-899X
DOI: 10.1088/1757-899x/1038/1/012056